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We provide products that are optimal for our customers' usage environments and purposes, compatible with substrate sizes from 1" to 6", as well as III-V and II-VI materials.
We consistently manufacture everything in-house, from major components such as molecular beam cells, RHEED, BFM, and substrate heating mechanisms to control units like chambers, shrouds, process controllers, and shutter controllers.
Standard equipped with scanning RHEED! Two motor-driven combinatorial masks installed.
The "MC-LMBE" is a compact ultra-high vacuum laser MBE (PLD) system with high operability. It is equipped with a semiconductor laser substrate heating unit that can heat up to 1200°C. It also has two motor-driven combinatorial masks. Additionally, the load-lock chamber unit allows for easy replacement of targets and substrates in a vacuum. 【Features】 ■ High operability and compact design ■ Achievable vacuum level: 6.7×10^-7Pa (below 5×10^-9Torr) ■ Two motor-driven combinatorial masks ■ Semiconductor laser substrate heating unit capable of heating up to 1200°C ■ Six types of targets available *For more details, please refer to the PDF document or feel free to contact us.
Easy-to-handle design allows for easy control of various film formation conditions! Six types of targets can be used.
The "PAC-LMBE" is a highly scalable ultra-high vacuum laser MBE (PLD) system. As a substrate heating unit, you can choose between infrared lamp heating and semiconductor laser heating. Six types of targets can be used. Additionally, the load-lock chamber unit allows for easy exchange of targets and substrates in a vacuum. 【Features】 ■ Highly scalable ■ Achievable vacuum level: below 6.7×10^-7Pa (5×10^-9Torr) ■ Six types of targets available ■ Easy exchange of targets and substrates in a vacuum with the load-lock chamber unit ■ Optional ports: various components can be mounted *For more details, please refer to the PDF materials or feel free to contact us.
